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Browsing by Author Dilliway, G D
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x
Mubarek, HAW El
;
Bonar, J M
;
Dilliway, G D
;
Wang, Y
;
Hemment, Peter L F
;
Willoughby, A F
;
Ashburn, Peter
;
Karunaratne, M. S. A